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Selected Beneq ALD technology for surface passivation
May 9, 2013
By: DAVID SAVASTANO
Editor, Ink World Magazine
China Sunergy, a leading Chinese solar cell manufacturer, has selected Beneq ALD technology for surface passivation to improve the energy efficiency of its products. Beneq has been developing crystalline silicon (c-Si) surface passivation with the batch atomic layer deposition (ALD) process since 2009. The first production-scale equipment will be delivered to China Sunergy in June 2013. Beneq has signed a major collaboration agreement with China Sunergy to implement batch ALD in the productio...
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